The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Aug. 23, 2011
Fardad Hashemi, Moraga, CA (US);
Douglas C. Watson, Campbell, CA (US);
Lorri L. Watson, Campbell, CA (US);
Fardad Hashemi, Moraga, CA (US);
Douglas C. Watson, Campbell, CA (US);
Nikon Research Corporation of America, Belmont, CA (US);
Abstract
A chamber assembly () for providing a sealed chamber () adjacent to a workpiece () to counteract the influence of gravity on the workpiece () includes a chamber housing (), and a seal assembly () that expands and/or contracts to better seal against the workpiece (). Further, the chamber assembly () can include one or more transducer assemblies () that expand or contract to quickly respond to leaks or injections of fluid in chamber assembly () to maintain a constant and stable chamber pressure in the chamber assembly (). Moreover, the chamber assembly () can utilize a pressure source () that directs a lager amount of fluid () through a fluid passageway () to accurately maintain the pressure within the chamber assembly ().