The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Aug. 21, 2014
Applicant:
Silcotek Corp., Bellefonte, PA (US);
Inventor:
James B. Mattzela, Port Matilda, PA (US);
Assignee:
Silcotek Corp., Bellefonte, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C23C 16/56 (2006.01); B05D 1/00 (2006.01); C23C 16/22 (2006.01); C09D 7/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/56 (2013.01); B05D 1/60 (2013.01); C23C 16/22 (2013.01); C09D 7/00 (2013.01);
Abstract
Semiconductor fabrication processes are described. An embodiment of the semiconductor fabrication process includes providing a layer formed by decomposition of dimethylsilane through chemical vapor deposition, the layer being applied by a fluid material, and then positioning the layer in a system for producing a semiconductor product. Additionally or alternatively, the semiconductor product is produced and/or the layer is on a substrate.