The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Feb. 27, 2015
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Michael Halpin, Scottsdale, AZ (US);
Eric Shero, Phoenix, AZ (US);
Carl White, Gilbert, AZ (US);
Fred Alokozai, Scottsdale, AZ (US);
Jerry Winkler, Gilbert, AZ (US);
Todd Dunn, Cave Creek, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01J 19/00 (2006.01); C23C 16/44 (2006.01); B01J 8/00 (2006.01); H01L 21/67 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4409 (2013.01); B01J 8/0035 (2013.01); B01J 19/0073 (2013.01); C23C 16/4585 (2013.01); H01L 21/67126 (2013.01);
Abstract
A reaction chamber including an upper region for processing a substrate, a lower region for loading a substrate, a susceptor movable within the reaction chamber, a first sealing member positioned on a perimeter of the susceptor, a second sealing member positioned between the upper region and the lower region, wherein the first and second sealing members are selectively engaged with one another to limit communication between the upper region and the lower region.