The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Jan. 26, 2011
Kazuyoshi Honda, Osaka, JP;
Satoshi Shibutani, Osaka, JP;
Yasuharu Shinokawa, Osaka, JP;
Sadayuki Okazaki, Osaka, JP;
Noriyuki Uchida, Osaka, JP;
Noriaki Amo, Hyogo, JP;
Kazuyoshi Honda, Osaka, JP;
Satoshi Shibutani, Osaka, JP;
Yasuharu Shinokawa, Osaka, JP;
Sadayuki Okazaki, Osaka, JP;
Noriyuki Uchida, Osaka, JP;
Noriaki Amo, Hyogo, JP;
Abstract
A conveyance systemA of a film-forming apparatusA includes a blowing rollerhaving a function of supplying a cooling gas toward a substrate. The blowing roller has the first shelland the internal block. The first shellhas a plurality of first through holesas a gas supply channel, and is rotatable in synchronization with the substrate. The internal blockis disposed inside the first shell. A manifoldis defined by the internal blockinside the first shell. The manifoldis formed so as to introduce the gas toward the plurality of first through holeswithin the range of a holding angle. A clearancefacing the plurality of first through holesoutside the range of the holding angle is further formed inside the first shell. In the radial direction, the manifoldhas a relatively large dimension, and the clearancehas a relatively small dimension.