The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2016

Filed:

Dec. 14, 2012
Applicants:

Kobe Steel, Ltd., Kobe-shi, JP;

Iscar Ltd., Tefen, IL;

Inventors:

Kenji Yamamoto, Hyogo, JP;

Albir A. Layyous, Me'ilya, IL;

Assignees:

Kobe Steel, Ltd., Kobe-shi, JP;

ISCAR LTD., Tefen, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/06 (2006.01); C23C 28/04 (2006.01); C23C 28/00 (2006.01); C23C 14/32 (2006.01); C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0664 (2013.01); C23C 14/06 (2013.01); C23C 14/325 (2013.01); C23C 14/34 (2013.01); C23C 28/042 (2013.01); C23C 28/044 (2013.01); C23C 28/42 (2013.01); C23C 28/44 (2013.01); Y10T 428/24975 (2015.01);
Abstract

Provided is a multilayer hard film capable of elongating a lifetime of a member. A multilayer hard film () is formed by alternately stacking a layer A () made of TiSi(BCN) [where 0.05≦x≦0.4, p≧0, q≧0, r>0, p+q+r=1], and a layer B () made of at least one selected from the group of TiBCN[where 0.05≦a≦0.5, 0.25≦b≦0.6, 0≦g≦0.5], SiCN[where 0.2≦c≦0.5, 0.25≦d≦0.5], BCN[where 0.03≦e≦0.25, 0.3≦f≦0.55], TiB, SiC and BC, one another over the surface of the substrate ().


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