The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2016

Filed:

Sep. 24, 2013
Applicant:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Inventors:

Angelo Antonio Merassi, Caponago, IT;

Sarah Zerbini, Fontanellato, IT;

Luca Coronato, Corsico, IT;

Assignee:

STMICROELECTRONICS S.R.L., Agrate Brianza, IT;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 25/00 (2006.01); B81C 1/00 (2006.01); B81B 3/00 (2006.01); H04R 7/24 (2006.01); H04R 19/00 (2006.01); H04R 31/00 (2006.01); H04R 19/04 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00182 (2013.01); B81B 3/0035 (2013.01); B81B 3/0072 (2013.01); B81C 1/00158 (2013.01); H04R 7/24 (2013.01); H04R 19/005 (2013.01); H04R 31/00 (2013.01); B81B 2201/0257 (2013.01); H04R 19/04 (2013.01); Y10T 29/49005 (2015.01);
Abstract

A MEMS acoustic transducer, for example, a microphone, includes a substrate provided with a cavity, a supporting structure, fixed to the substrate, a membrane having a perimetral edge and a centroid, suspended above the cavity and fixed to the substrate the membrane configured to oscillate via the supporting structure. The supporting structure includes a plurality of anchorage elements fixed to the membrane, and each anchorage element is coupled to a respective portion of the membrane between the centroid and the perimetral edge of the membrane.


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