The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2016

Filed:

Dec. 15, 2014
Applicant:

Nikon Corporation, Tokyo, JP;

Inventors:

Makoto Nakazumi, Yamato, JP;

Yasutaka Nishi, Tokyo, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 29/786 (2006.01); H01L 29/66 (2006.01); C25D 9/08 (2006.01); H01L 29/45 (2006.01); H01L 27/12 (2006.01); C25D 5/02 (2006.01); H01L 21/768 (2006.01); H01L 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66969 (2013.01); C25D 5/02 (2013.01); C25D 9/08 (2013.01); H01L 21/02425 (2013.01); H01L 21/02491 (2013.01); H01L 21/02494 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02617 (2013.01); H01L 21/02628 (2013.01); H01L 21/768 (2013.01); H01L 27/124 (2013.01); H01L 27/1292 (2013.01); H01L 29/24 (2013.01); H01L 29/45 (2013.01); H01L 29/7869 (2013.01); Y10T 428/24802 (2015.01);
Abstract

A method of manufacturing a zinc oxide thin film includes: immersing a base having a conductive portion in at least part of the base, in a solution containing zinc ions, hydroxide ions, and zinc complex ions; and by applying an alternating current to the conductive portion, forming a zinc oxide thin film on a region of the base, the region including the conductive portion.


Find Patent Forward Citations

Nakazumi, Makoto. (2016). Method of manufacturing zinc oxide thin film, method of manufacturing thin film transistor, zinc oxide thin film, thin film transistor, and transparent oxide wiring (U.S. Patent No. 9337320). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9337320

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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