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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9337100 B1

PDFFull Text
Date of Patent:
May. 10, 2016

Filed:

Jun. 03, 2009

Apparatus and method to fabricate an electronic device

Applicants:

Seung-chul Song, Austin, TX (US);

Beom-mo Han, San Diego, CA (US);

Mohamed Hassan Abu-rahma, San Diego, CA (US);

Inventors:

Seung-Chul Song, Austin, TX (US);

Beom-Mo Han, San Diego, CA (US);

Mohamed Hassan Abu-Rahma, San Diego, CA (US);

Assignee:

QUALCOMM Incorporated, San Diego, CA (US);

Attorneys:

Donald D. Min

Paul Holdaway

Primary Examiner:

Fei Fei Yeung Lopez

Int. Cl.
CPC ...
H01L 21/77 (2006.01); H01L 21/8234 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01L 21/3213 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823431 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/32139 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); G03F 7/0002 (2013.01); Y10T 29/41 (2015.01); Y10T 428/24479 (2015.01);
Abstract

An apparatus and method to fabricate an electronic device is disclosed. In a particular embodiment, an apparatus includes a template having an imprint surface. The imprint surface includes a first region having a first pattern adapted to fabricate a fin field effect transistor (FinFET) device and a second region having a second pattern adapted to fabricate a planar electronic device.

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Song, Seung-Chul. (2016). Apparatus and method to fabricate an electronic device (U.S. Patent No. 9337100). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9337100

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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