The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 10, 2016

Filed:

Aug. 28, 2014
Applicant:

Hgst Netherlands B.v., Amsterdam, NL;

Inventors:

Hitesh Arora, Fremont, CA (US);

Sripathi Vangipuram Canchi, San Jose, CA (US);

Franck Dreyfus Rose, San Jose, CA (US);

Ricardo Ruiz, Santa Clara, CA (US);

Vipin Ayanoor-Vitikkate, Union City, CA (US);

Assignee:

HGST Netherlands B.V., Amsterdam, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); B23P 15/00 (2006.01); C03C 25/00 (2006.01); C23F 1/00 (2006.01); C03C 25/68 (2006.01); H01L 21/00 (2006.01); G11B 5/84 (2006.01);
U.S. Cl.
CPC ...
G11B 5/84 (2013.01);
Abstract

A method to fabricate an imprint template for bit-patterned magnetic recording media using block copolymers (BCPs) integrates data region patterning and servo region patterning. A heat sink layer is formed on the imprint substrate only in the data regions. A sublayer for the BCP is deposited over both the data regions and the servo regions and patterned to form stripes in the data regions and servo features in the servo regions. A BCP is then deposited in both the data and servo regions. Only the BCP in the data regions is heated, which causes phase separation of the BCP in the data regions into the two BCP components. The selective heating may be accomplished by directed controlled laser radiation to only the data regions. The heat sink layer below the data regions absorbs the heat from the laser radiation, confining it to the data regions.


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