The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Sep. 12, 2013
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Mark Taskar, San Mateo, CA (US);
Iqbal Shareef, Fremont, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Freemont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 27/00 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0641 (2013.01); F16K 27/003 (2013.01); G05D 7/0652 (2013.01); Y10T 137/2499 (2015.04);
Abstract
A multi-line mass flow device configured for controlled delivery of two or more fluids into a process chamber. The multi-line mass flow device comprises a cluster mass flow control manifold and a multi-inlet manifold. The cluster mass flow control manifold comprises a controller, a gas manifold mounting block, and two or more gas flow control stations. The multi-inlet manifold comprises a multi-inlet mounting block, and two or more isolation valves mounted on the multi-inlet mounting block.