The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Apr. 14, 2010
Applicants:
Yukiko Kikuchi, Fujisawa, JP;
Shinichi Ito, Yokohama, JP;
Inventors:
Yukiko Kikuchi, Fujisawa, JP;
Shinichi Ito, Yokohama, JP;
Assignee:
KABUSHIKI KAISHA TOSHIBA, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
B29C 59/02 (2006.01); G03F 7/00 (2006.01); H01L 21/768 (2006.01); H01L 23/00 (2006.01); H01L 23/544 (2006.01); H01L 23/58 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); H01L 21/76838 (2013.01); H01L 24/03 (2013.01); H01L 24/05 (2013.01); H01L 23/544 (2013.01); H01L 23/585 (2013.01); H01L 2224/05599 (2013.01); H01L 2924/00014 (2013.01); H01L 2924/01004 (2013.01); H01L 2924/01005 (2013.01); H01L 2924/01006 (2013.01); H01L 2924/01014 (2013.01); H01L 2924/01023 (2013.01); H01L 2924/01033 (2013.01); H01L 2924/01082 (2013.01);
Abstract
A template for imprinting in which a pattern is transferred onto a first substrate applied curable resin thereon, including a second substrate having a surface to be contacted with the curable resin, a concave portion provided on the surface and corresponding to a pattern to be transferred onto the first substrate, and at least one convex portion arranged in the concave portion to decrease volume of the concave portion.