The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Apr. 11, 2014
Olympus Corporation, Shibuya-ku, Tokyo, JP;
Nobuaki Sakai, Hachioji, JP;
OLYMPUS CORPORATION, Tokyo, JP;
Abstract
A scanning probe microscope includes a cantilever having a probe at a free thereof, a displacement detector to output a displacement signal of the cantilever, a vibrator to vibrate the cantilever, and a scanner to three-dimensionally relatively move the sample and probe. A mixed signal generator includes an amplitude information detecting section to provide a vibrating signal to the vibrator and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller to control the scanner includes a Z control section, which controls the distance between the sample and the probe on the basis of the mixed signal.