The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Mar. 05, 2015
Lam Research Corporation, Fremont, CA (US);
Travis R. Taylor, Fremont, CA (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A method for diagnosing a particle removal system of a substrate processing system includes dispersing synthetic particles onto a substrate; exciting the synthetic particles using a light source having a first predetermined wavelength; measuring photoluminescence of the synthetic particles at a second predetermined wavelength that is different than the first predetermined wavelength and determining a first number of the synthetic particles on the substrate; at least one of moving the substrate through a chamber or processing the substrate in the chamber of the substrate processing system; exciting the synthetic particles using light having the first predetermined wavelength; measuring photoluminescence of the synthetic particles at the second predetermined wavelength that is different than the first predetermined wavelength; and determining a second number of the synthetic particles on the substrate based on the measuring.