The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Jul. 31, 2014
Applicant:
The Regents of the University of California;
Inventors:
Assignee:
The Regents of the University of California, Oakland, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); G01J 5/08 (2006.01); H01L 37/02 (2006.01); H01L 27/146 (2006.01); G01J 5/34 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0853 (2013.01); G01J 5/34 (2013.01); H01L 27/14649 (2013.01); H01L 27/14683 (2013.01); H01L 37/02 (2013.01); B81B 3/0045 (2013.01); B81C 1/0015 (2013.01);
Abstract
A MEMS sensor for detecting electromagnetic waves in a particular frequency range is provided. In a preferred embodiment, the MEMS sensor comprises a bottom substrate layer; a first electrode layer over the substrate layer; a pyroelectric layer over the first electrode layer; and a second electrode layer over the pyroelectric layer; wherein a top electrode layer is patterned with a periodic structure that has a periodicity less than or equal to target infrared wavelength.