The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Aug. 28, 2013
Jochen Zoellin, Muellheim, DE;
Ricardo Ehrenpfordt, Korntal-Muenchingen, DE;
Juergen Graf, Stuttgart, DE;
Christoph Schelling, Stuttgart, DE;
Frederik Ante, Stuttgart, DE;
Michael Curcic, Stuttgart, DE;
Jochen Zoellin, Muellheim, DE;
Ricardo Ehrenpfordt, Korntal-Muenchingen, DE;
Juergen Graf, Stuttgart, DE;
Christoph Schelling, Stuttgart, DE;
Frederik Ante, Stuttgart, DE;
Michael Curcic, Stuttgart, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A new signal acquisition concept is provided for MEMS components having a pressure-sensitive diaphragm element, which at least partially spans a pressure connection opening. This signal acquisition concept is distinguished by an especially high sensitivity. For this purpose, the MEMS component includes a resonant vibrator device having a vibrating element, which is suspended, capable of vibrating, within a closed cavity and is equipped with at least one drive electrode and at least one sensing electrode. The vibrating element of the resonant vibrator device is coupled mechanically to the diaphragm element, so that the vibrating element is deformed in the case of a diaphragm deflection.