The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Nov. 28, 2012
Freescale Semiconductor, Inc., Austin, TX (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
An inertial sensor () includes a drive system () configured to oscillate a drive mass () within a plane () that is substantially parallel to a surface () of a substrate (). The drive system () includes first and second drive units () having fixed fingers () interleaved with movable fingers () of the drive mass (). At least one of the drive units () is located on each side () of the drive mass (). Likewise, at least one of the drive units () is located on each side () of the drive mass (). The drive units () are driven in phase opposition to the drive units () so that a levitation force () generated by the drive units () compensates for, or at least partially suppresses, a levitation force () generated by the drive units ().