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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9334582 B1

PDFFull Text
Date of Patent:
May. 10, 2016

Filed:

Jan. 22, 2015

Apparatus for evaluating quality of crystal, and method and apparatus for manufacturing semiconductor light-emitting device including the apparatus

Applicant:

Samsung Electronics Co., Ltd., Suwon-Si, Gyeonggi-Do, KR;

Inventors:

Jong-uk Seo, Suwon-si, KR;

Byoung-kyun Kim, Seongnam-si, KR;

Suk-ho Yoon, Seoul, KR;

Keon-hun Lee, Seoul, KR;

Kee-won Lee, Suwon-si, KR;

Do-young Rhee, Seoul, KR;

Sang-don Lee, Suwon-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Gyeonggi-do, KR;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Caleb Henry

Int. Cl.
CPC ...
H01L 21/66 (2006.01); C30B 25/08 (2006.01); H01L 33/06 (2010.01); G01N 21/95 (2006.01); H01L 21/02 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
C30B 25/08 (2013.01); G01N 21/9501 (2013.01); H01L 33/06 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 22/12 (2013.01); H01L 33/007 (2013.01); H01L 33/0075 (2013.01);
Abstract

An apparatus for evaluating the quality of a crystal includes an optical device that measures a surface reflectance of a wafer in which a V-pit is formed; and a data processing unit that calculates a threading dislocation density by calculating a difference in surface reflectance of the wafer that is measured by the optical device.

Find Patent Forward Citations

Seo, Jong-uk. (2016). Apparatus for evaluating quality of crystal, and method and apparatus for manufacturing semiconductor light-emitting device including the apparatus (U.S. Patent No. 9334582). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9334582

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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