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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9333735 B1

PDFFull Text
Expired
Date of Patent:
May. 10, 2016

Filed:

Apr. 03, 2014

Methods for operating a debonder

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventor:

Patrick A. Raymond, Enosburg Falls, VT (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:

Thompson Hine LLP

Anthony J. Canale

Primary Examiner:

Mark A Osele

Assistant Examiner:

Nickolas Harm

Int. Cl.
CPC ...
B32B 38/10 (2006.01); B32B 43/00 (2006.01); H01L 23/00 (2006.01);
U.S. Cl.
CPC ...
B32B 43/006 (2013.01); H01L 24/98 (2013.01); B32B 38/10 (2013.01); B32B 2307/20 (2013.01); B32B 2457/14 (2013.01); Y10T 156/1111 (2015.01);
Abstract

Methods for releasing a device substrate temporarily bonded by a bonding layer to a carrier substrate. A dissolution head is engaged with the carrier substrate and a first dissolution process is performed to partially remove the bonding layer. After the first dissolution process is completed, the dissolution head is disengaged from the carrier substrate, and then re-engaged with the carrier substrate. In response to re-engaging the dissolution head with the carrier substrate, a second dissolution process is performed to further remove the bonding layer remaining after the first dissolution process.

Find Patent Forward Citations

Raymond, Patrick. (2016). Methods for operating a debonder (U.S. Patent No. 9333735). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9333735

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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