The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 10, 2016
Filed:
Sep. 21, 2006
Applicant:
Marilena Radoiu, Nailsea, GB;
Inventor:
Marilena Radoiu, Nailsea, GB;
Assignee:
Edwards Limited, Crawley, West Sussex, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01D 53/32 (2006.01); C23C 16/511 (2006.01); B01J 19/12 (2006.01); A62D 3/178 (2007.01); A62D 3/38 (2007.01); C23C 16/44 (2006.01); H05H 1/24 (2006.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
B01D 53/32 (2013.01); A62D 3/178 (2013.01); A62D 3/38 (2013.01); B01J 19/126 (2013.01); C23C 16/4412 (2013.01); C23C 16/511 (2013.01); H05H 1/24 (2013.01); H05H 1/46 (2013.01); B01D 2257/204 (2013.01); B01D 2257/206 (2013.01); B01D 2258/0216 (2013.01); B01D 2259/818 (2013.01); H05H 2001/4622 (2013.01); H05H 2001/4697 (2013.01); H05H 2245/121 (2013.01);
Abstract
A plasma abatement device comprises a gas chamber having a gas inlet for receiving a gas to be treated by the device and a gas outlet, at least part of the inner surface of the gas chamber being formed from, or coated with, an electrically conductive material that is resistant to corrosion during treatment of a gas containing a halocompound and water vapor.