The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
May. 20, 2013
Tdk Corporation, Tokyo, JP;
Kazuhiko Maejima, Tokyo, JP;
Yasuhiro Aida, Tokyo, JP;
Yoshitomo Tanaka, Tokyo, JP;
Katsuyuki Kurachi, Tokyo, JP;
Hitoshi Sakuma, Tokyo, JP;
TDK CORPORATION, Tokyo, JP;
Abstract
A thin film piezoelectric element according to the present invention includes a potassium sodium niobate thin film having a structure in which a plurality of crystal grains are present in a film thickness direction; and a pair of electrode films sandwiching the potassium sodium niobate thin film. When the potassium sodium niobate thin film is divided into three regions of the same thickness in the film thickness direction and average crystal grain sizes A, A, and Aof the respective regions are determined, a ratio m/M of the smallest average crystal grain size m among A, A, and Ato the largest average crystal grain size M among A, A, and Ais 10% to 80%. The region having the smallest average crystal grain size m lies next to one of the pair of electrode films.