The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Jun. 30, 2010
Applicants:

Tony S. Cruz-uribe, Corvallis, OR (US);

Peter Mardilovich, Corvallis, OR (US);

Inventors:

Tony S. Cruz-Uribe, Corvallis, OR (US);

Peter Mardilovich, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/22 (2013.01); H01L 41/047 (2006.01); B41J 2/14 (2006.01); B41J 2/16 (2006.01); H01L 41/09 (2006.01); H01L 41/29 (2013.01); B05B 17/06 (2006.01); H01L 41/257 (2013.01);
U.S. Cl.
CPC ...
H01L 41/047 (2013.01); B05B 17/0653 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1626 (2013.01); B41J 2/1631 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); H01L 41/0973 (2013.01); H01L 41/22 (2013.01); H01L 41/257 (2013.01); H01L 41/29 (2013.01);
Abstract

A piezoelectric actuator is formed by forming first and second electrodes on a substrate, and depositing a material on the substrate and between side surfaces of adjacent first and second electrodes to form a thin film sheet within which the first and the second electrodes extend from a first surface of the thin film sheet towards a second surface of the thin film sheet opposite the first surface. The second electrode is interdigitated in relation to the first electrode. The side surfaces of the first and the second electrodes are at least substantially perpendicular to the substrate. The thin film sheet is to physically deform in response to an electric field induced within the thin film sheet via application of a voltage across the first and the second electrodes.


Find Patent Forward Citations

Loading…