The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Jan. 07, 2015
Applicant:

Semiconductor Manufacturing International (Shanghai) Corporation, Shanghai, CN;

Inventors:

Jianhua Ju, Shanghai, CN;

Shuai Zhang, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/11 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1104 (2013.01); H01L 29/66492 (2013.01); H01L 29/66795 (2013.01);
Abstract

A method of manufacturing a semiconductor device is provided. The method includes forming a fin structure on a semiconductor substrate and forming a well region in the semiconductor substrate by ion implantation so as to form transistors. The transistors include a pull-up transistor, a transfer gate transistor, and a pull-down transistor of a SRAM cell. The ion implantation is used to adjust threshold voltages of the transistors. Standard threshold voltage (SVt) ion implantation conditions are used to adjust a threshold voltage of the pull-up transistor and a threshold voltage of the transfer gate transistor, and low threshold voltage (LVt) ion implantation conditions are used to adjust a threshold voltage of the pull-down transistor.


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