The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Mar. 23, 2012
Yukio Miura, Tokyo, JP;
Shinichi Maeta, Tokyo, JP;
Takashi Satou, Tokyo, JP;
Kei Furuuchi, Tokyo, JP;
Yukio Miura, Tokyo, JP;
Shinichi Maeta, Tokyo, JP;
Takashi Satou, Tokyo, JP;
Kei Furuuchi, Tokyo, JP;
Sumitomo Osaka Cement Co., Ltd., Tokyo, JP;
Abstract
An electrostatic chuck device () according to the invention includes an electrostatic chuck section () that has a principal surface as a placement surface on which a plate-shaped sample is placed, and is made to have an internal electrode for electrostatic adsorption built-in, and a cooling plate section () that cools the electrostatic chuck section (), wherein a heating member () is bonded to a principal surface on the opposite side to the placement surface of the electrostatic chuck section () through a first adhesive material layer (), and the electrostatic chuck section () and the heating member () are bonded to and integrated with the cooling plate section () through an acrylic adhesive layer () having flexibility and insulation properties.