The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Oct. 10, 2014
Applicant:
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Inventors:
Robert Chen, Mountain View, CA (US);
James S. Harris, Jr., Stanford, CA (US);
Suyog Gupta, White Plains, NY (US);
Assignee:
The Board of Trustees of the Leland Stanford Junior University, Palo Alto, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/00 (2006.01); H01L 29/161 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01L 29/06 (2006.01); H01S 5/34 (2006.01); H01L 21/3065 (2006.01); B81C 1/00 (2006.01); H01S 5/10 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02535 (2013.01); B81C 1/00111 (2013.01); B81C 1/00571 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/3065 (2013.01); H01L 29/0665 (2013.01); H01L 29/161 (2013.01); H01S 5/3427 (2013.01); B81C 2201/014 (2013.01); H01L 21/0245 (2013.01); H01L 21/02381 (2013.01); H01L 21/02452 (2013.01); H01L 21/02507 (2013.01); H01L 29/0676 (2013.01); H01S 5/1075 (2013.01);
Abstract
Suspended structures are provided using selective etch technology. Such structures can be protected on all sides when the selective undercut etch is performed, thereby providing excellent control of feature geometry combined with superior material quality.