The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Aug. 07, 2013
Korea Institute of Science and Technology, Seoul, KR;
Man-Ho Kim, Seoul, KR;
Korea Institute of Science and Technology, Seoul, KR;
Abstract
The detecting apparatus comprises: a monochromator, for Bragg-diffracting the incident beam; an analyzer, on which the beam diffracted by the monochromator is incident, an analyzer Bragg-diffracting the incident beam; a controller, for controlling the driver connected to the monochromator and the analyzer, so as to rotate the analyzer or the monochromator in a first direction and in a second direction opposite to the first direction; and a detector, for detecting the beam diffracted by the analyzer or transmitted through the analyzer while the analyzer or the monochromator is rotating and measuring a backlash and/or a slip of the driver by using the detected beam. The backlash detecting apparatus can measure a backlash and/or a slip in the unit of sub-arcsecond or sub-nanometer by using the radiation beam such as a neutron beam, an X-ray beam or the like.