The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 03, 2016

Filed:

Aug. 05, 2011
Applicants:

Shin-ichi Ogino, Ibaraki, JP;

Yuichiro Nakamura, Ibaraki, JP;

Inventors:

Shin-ichi Ogino, Ibaraki, JP;

Yuichiro Nakamura, Ibaraki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); G11B 5/851 (2006.01); H01F 41/18 (2006.01); H01J 37/34 (2006.01); H01F 1/06 (2006.01); C23C 14/14 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3414 (2013.01); G11B 5/851 (2013.01); H01F 41/183 (2013.01); H01J 37/3405 (2013.01); H01J 37/3426 (2013.01); H01J 37/3429 (2013.01); C23C 14/14 (2013.01); H01F 1/068 (2013.01);
Abstract

An Fe—Pt-based ferromagnetic material sputtering target comprising a metal and a metal oxide, wherein the metal has a composition in which Pt is contained in an amount of 5 mol % or more and 60 mol % or less and the remainder is Fe. An object of the present invention is to provide a ferromagnetic material sputtering target, which enables to form a magnetic recording layer composed of a magnetic phase such as an Fe—Pt alloy, and a non-magnetic phase to isolate the magnetic phase, and in which a metal oxide is used as one of the materials for the non-magnetic phase. Provided is a ferromagnetic material sputtering target wherein an inadvertent release of the metal oxide during sputtering and particle generation due to abnormal electrical discharge starting at a void inherently included in the target are suppressed, the adherence between the metal oxide and the matrix alloy is enhanced, and its density is increased.


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