The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9328410 B1

PDF
Full Text
Expired
Date of Patent:
May. 03, 2016

Filed:

Oct. 25, 2013
Applicants:

Von Ardenne Gmbh, Dresden, DE;

First Solar, Inc., Perrysburg, OH (US);

Inventors:

Bernd Teichert, Dresden, DE;

Klaus Schneider, Arnsdorf, DE;

Christoph Kaiser, Dresden, DE;

Michael Rivkin, Los Altos, CA (US);

George Arthur Proulx, Castro Valley, CA (US);

Assignees:

First Solar, Inc., Perrysburg, OH (US);

VON ARDENNE GmbH, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); C23C 14/35 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C23C 14/35 (2013.01); H01J 37/3414 (2013.01); H01J 37/3417 (2013.01); H01J 37/3432 (2013.01); C23C 14/086 (2013.01);
Abstract

In various embodiments, a physical vapor deposition tile arrangement is provided. The physical vapor deposition tile arrangement may include a plurality of physical vapor deposition tiles arranged next to each other; and a resilient structure configured to press the plurality of physical vapor deposition tiles together.


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Teichert, Bernd. (2016). Physical vapor deposition tile arrangement and physical vapor deposition arrangement (U.S. Patent No. 9328410). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9328410

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