The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Aug. 30, 2012
Kazutaka Taniguchi, Kyoto, JP;
Masafumi Kawagoe, Kyoto, JP;
Mikio Masuichi, Kyoto, JP;
Tomoyuki Komura, Kyoto, JP;
Kazutaka Taniguchi, Kyoto, JP;
Masafumi Kawagoe, Kyoto, JP;
Mikio Masuichi, Kyoto, JP;
Tomoyuki Komura, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A carrier and a substrate are aligned even if an imager cannot be simultaneously focused on alignment marks formed on both the carrier and the substrate. Center of gravity positions Gof an alignment pattern element APon a substrate and Gof an alignment pattern element APon a transparent blanket are calculated by image processing from an image IM imaged via the blanket by a CCD camera. The position of the center of gravity Gmis specified by a process associated with edge extraction from the image imaged with the alignment pattern element APon the blanket being in focus. High spatial frequency components are removed and low frequency components are extracted for the alignment pattern element APon the substrate imaged out of focus to have a blurred outline, and the position of the center of gravity Gis specified from an extraction result.