The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 26, 2016

Filed:

May. 14, 2013
Applicant:

Tdk Corporation, Tokyo, JP;

Inventors:

Masahito Furukawa, Tokyo, JP;

Tomohisa Azuma, Tokyo, JP;

Taku Masai, Tokyo, JP;

Assignee:

TDK CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); C04B 35/00 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/313 (2013.01);
U.S. Cl.
CPC ...
H01L 41/0477 (2013.01); H01L 41/0815 (2013.01); H01L 41/1873 (2013.01); H01L 41/313 (2013.01);
Abstract

A piezoelectric device includes a first electrode film, a piezoelectric film disposed on the first electrode film, and a second electrode film disposed on the piezoelectric film. At least one of the first and second electrode films is composed of an alloy, and a main component of the alloy is a metal selected from the group consisting of Ti, Al, Mg, and Zn. The piezoelectric film has a main composition represented by (KNaLiBaSr)(NbTaZr)O(1), where x, y, z, w, v, u, and m in formula (1) satisfy 0.4<x≦0.7, 0.02≦y≦0.11, 0.5≦x+y<0.75, 0<z≦0.28, 0<w≦0.02, 0.02≦v≦0.11, 0.02≦u≦0.11, and 0.95≦m<1.2, and contains 1% by mass or less of MnO relative to the main composition.


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