The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
May. 25, 2013
Applicant:
Fujitsu Limited, Kawasaki, JP;
Inventors:
Norikazu Nakamura, Kawasaki, JP;
Shirou Ozaki, Kawasaki, JP;
Masayuki Takeda, Kawasaki, JP;
Keiji Watanabe, Kawasaki, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/51 (2006.01); H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 23/29 (2006.01); H01L 23/31 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 21/28 (2006.01); H01J 37/32 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/2003 (2013.01); H01J 37/32357 (2013.01); H01L 21/28264 (2013.01); H01L 23/291 (2013.01); H01L 23/3171 (2013.01); H01L 29/41766 (2013.01); H01L 29/4236 (2013.01); H01L 29/42364 (2013.01); H01L 29/51 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 29/66462 (2013.01); H01L 29/66477 (2013.01); H01L 29/7786 (2013.01); H01L 29/7787 (2013.01); H01L 29/78 (2013.01); H01L 2224/0603 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/48257 (2013.01); H01L 2224/48472 (2013.01); H01L 2224/4903 (2013.01); H01L 2924/181 (2013.01);
Abstract
A semiconductor device, includes a semiconductor layer formed above a substrate; an insulating film formed on the semiconductor layer; and an electrode formed on the insulating film. The insulating film has a membrane stress at a side of the semiconductor layer lower than a membrane stress at a side of the electrode.