The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Mar. 27, 2012
Chyi-shyuan Chern, Taipei, TW;
Hsin-hsien Wu, Hsinchu, TW;
Yung-hsin Yang, Hsinchu, TW;
Ching-hua Chiu, Hsinchu, TW;
Chyi-Shyuan Chern, Taipei, TW;
Hsin-Hsien Wu, Hsinchu, TW;
Yung-Hsin Yang, Hsinchu, TW;
Ching-Hua Chiu, Hsinchu, TW;
EPISTAR CORPORATION, Hsinchu, TW;
Abstract
The present disclosure involves a method of fabricating a light-emitting diode (LED) wafer. The method first determines a target surface morphology for the LED wafer. The target surface morphology yields a maximum light output for LEDs on the LED wafer. The LED wafer is etched to form a roughened wafer surface. Thereafter, using a laser scanning microscope, the method investigates an actual surface morphology of the LED wafer. Afterwards, if the actual surface morphology differs from the target surface morphology beyond an acceptable limit, the method repeats the etching step one or more times. The etching is repeated by adjusting one or more etching parameters.