The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Jun. 13, 2012
Alton H. Phillips, East Palo Alto, CA (US);
Douglas C. Watson, Campbell, CA (US);
Lorri L. Watson, Campbell, CA (US);
Alton H. Phillips, East Palo Alto, CA (US);
Douglas C. Watson, Campbell, CA (US);
Nikon Corporation, , JP;
Abstract
A mirror assembly () for directing a beam () from an illumination source () to a reticle () includes a mirror () and a back plate (). The mirror () includes a mirror body (A) that defines a reflective first surface (B) that directs the beam (), a mirror mounting region (), a mirror perimeter region () that encircles the mirror mounting region (), and mirror slot () that separates the mirror perimeter region () from the mirror mounting region (). The back plate () retains and engages the mirror mounting region () of the mirror () with the mirror perimeter region () spaced apart from the back plate (). Further, the mirror body (A) can include a second surface (C) that is substantially opposite the first surface (B), and the mirror mounting region () extends between the second surface (C) to near the first surface (B). Further, the mirror slot () extends from the second surface (C) to near the first surface (B).