The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 26, 2016
Filed:
Mar. 20, 2013
Riber, Bezons, FR;
Olivier Grange, Saint-Cloud, FR;
RIBER, Bezons, FR;
Abstract
The leak detection device is adapted to test the tightness of an inner tank () of a valve cell () of the vacuum deposition apparatus, either at its filling flange () or at its inner tank valve (). A vacuum deposition apparatus equipped with a helium detector () mounted as a by-pass of the output of a high-flow-rate turbomolecular pump () which is connected to the vacuum deposition chamber () of the vacuum deposition apparatus by a slide gate valve (). A valve-cell vacuum deposition apparatus equipped with a helium-based leak detection device including gas injection elements () adapted to inject a gaseous mixture into the outer enclosure, the gaseous mixture being consisted of pure helium and an inert gas, and a method for detecting a leak in a valve-cell vacuum deposition apparatus are also described.