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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9322094 B1

PDFFull Text
Date of Patent:
Apr. 26, 2016

Filed:

Nov. 01, 2013

Film-forming apparatus

Applicant:

Canon Anelva Corporation, Kawasaki-shi, JP;

Inventors:

Yuji Kajihara, Fuchu, JP;

Yasushi Yasumatsu, Inagi, JP;

Kazuya Konaga, Kawasaki, JP;

Assignee:

CANON ANELVA CORPORATION, Kawasaki-shi, JP;

Attorney:

Fitzpatrick, Cella, Harper & Scinto

Primary Examiner:

Keith Hendricks

Assistant Examiner:

Timon Wanga

Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/34 (2006.01); C23C 14/04 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3464 (2013.01); C23C 14/04 (2013.01); C23C 14/3407 (2013.01); C23C 14/505 (2013.01); C23C 14/54 (2013.01); C23C 14/564 (2013.01); H01J 37/3417 (2013.01); H01J 37/3429 (2013.01); H01J 37/3435 (2013.01); H01J 37/3447 (2013.01);
Abstract

The present invention provides a film forming apparatus configured such that the occurrence of contamination is reduced between targets. The film forming apparatus includes: a plurality of target electrodes respectively having attachment surfaces to which targets can be attached; a substrate holder for holding a substrate at a position opposing the plurality of target electrodes; a first shutter member rotatably provided between the plurality of target electrodes and the substrate holder and having a plurality of openings that can oppose the attachment surfaces; and a shield member disposed adjacent to the first shutter member and having a number of openings equal to the number of the target electrodes, wherein a gap between the first shutter member and the shield member widens toward an outer perimeter from a portion where adjacent target electrodes are closest.

Find Patent Forward Citations

Kajihara, Yuji. (2016). Film-forming apparatus (U.S. Patent No. 9322094). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9322094

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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