The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2016

Filed:

Apr. 22, 2015
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Kyung-Eun Kim, Seoul, KR;

Dae-Ik Kim, Hwaseong-si, KR;

Young-Seung Cho, Yongin-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/10 (2006.01); H01L 27/108 (2006.01); H01L 21/02 (2006.01); H01L 21/768 (2006.01); H01L 21/311 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10885 (2013.01); H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/31144 (2013.01); H01L 21/76877 (2013.01); H01L 27/10852 (2013.01); H01L 27/10873 (2013.01); H01L 27/10888 (2013.01);
Abstract

A method of forming a DRAM can include forming a plurality of transistors arranged in a first direction on a substrate and forming a bit line structure that extends in the first direction, where the bit line structure being electrically coupled to the plurality of transistors at respective locations in the first direction. A plurality of first landing pads an be formed at alternating ones of the respective locations having a first position in a second direction on the substrate. A plurality of second landing pads can be formed at intervening ones of the respective locations between the alternating ones of the respective locations, where the intervening ones of the respective locations having a second position in the second direction on the substrate wherein second position is shifted in the second direction relative to the first position.


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