The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Apr. 28, 2011
Applicants:
Thomas Fischer, Regensburg, DE;
Raimund Foerg, Straubing, DE;
Sebastian Bernrieder, Regensburg, DE;
Michael Larisch, Regensburg, DE;
Inventors:
Thomas Fischer, Regensburg, DE;
Raimund Foerg, Straubing, DE;
Sebastian Bernrieder, Regensburg, DE;
Michael Larisch, Regensburg, DE;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/00 (2006.01); H01L 31/18 (2006.01); C23F 1/08 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67086 (2013.01); H01L 21/6704 (2013.01); H01L 21/67017 (2013.01); H01L 21/67057 (2013.01); H01L 21/67075 (2013.01);
Abstract
An etching device is provided, the etching device including a process chamber including an etchant, a structure configured to provide a laminar flow of the etchant, and a workpiece handler configured to move a workpiece through the laminar flow of the etchant along a predefined track.