The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Apr. 07, 2011
Applicants:
Chang-hoon Kim, Asan-si, KR;
Gug-rae JO, Asan-si, KR;
Hong-suk Yoo, Anysang-si, KR;
Bo-kyoung Ahn, Cheonan-si, KR;
Inventors:
Chang-Hoon Kim, Asan-si, KR;
Gug-Rae Jo, Asan-si, KR;
Hong-Suk Yoo, Anysang-si, KR;
Bo-Kyoung Ahn, Cheonan-si, KR;
Assignee:
SAMSUNG DISPLAY CO., LTD., , KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7035 (2013.01); G03F 7/7015 (2013.01); G03F 7/70058 (2013.01);
Abstract
Provided are an exposure apparatus and an exposure method using the same. The exposure apparatus includes: a light source unit configured to emit light; a substrate stage supporting a substrate, the substrate comprising an exposure area and a non-exposure area; and a prism unit disposed between the light source unit and the substrate stage, the prism unit movable so as to transmit the light to the exposure area and to block the light from the non-exposure area.