The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Apr. 22, 2013
Freescale Semiconductor, Inc., Austin, TX (US);
Aaron A. Geisberger, Austin, TX (US);
Kemiao Jia, Phoenix, AZ (US);
FREESCALE SEMICONDCUTOR, INC., Austin, TX (US);
Abstract
An apparatus () includes a motion amplification structure (), an actuator (), and a sense electrode () in proximity to the structure (). The actuator () induces an axial force () upon the structure (), which causes a relatively large amount of in-plane motion () in one or more beams () of the structure (). When sidewalls () of the beams () exhibit a skew angle (), the in-plane motion () of the beams () produces out-of-plane motion () of a paddle element () connected to the end of the beams (). The skew angle (), which results from an etch process, defines a degree to which the sidewalls () of beams () are offset or tilted from their design orientation. The out-of-plane motion () of element () is sensed at the electrode (), and is utilized to determine an estimated skew angle ().