The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Apr. 24, 2014
Applicant:
Canon Anelva Corporation, Kawasaki-shi, JP;
Inventors:
Itaru Enomoto, Kawasaki, JP;
Hideo Mano, Kawasaki, JP;
Assignee:
Canon Anelva Corporation, Kawasaki-shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 21/34 (2006.01); G01L 21/32 (2006.01); G01L 21/30 (2006.01); H01J 41/04 (2006.01); H01J 41/06 (2006.01);
U.S. Cl.
CPC ...
G01L 21/34 (2013.01); G01L 21/30 (2013.01); G01L 21/32 (2013.01); H01J 41/04 (2013.01); H01J 41/06 (2013.01);
Abstract
A cold cathode ionization vacuum gauge, including: two electrodes disposed such that one of the electrodes is surrounded by the other electrode to thereby form a discharge space therebetween; and an electrode protection member disposed in the discharge space and configured to protect an inner wall surface of the other electrode, wherein the electrode protection member has electric conductivity and is elastically deformed along a shape of the inner wall surface to be electrically connected to the other electrode.