The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 19, 2016

Filed:

Mar. 11, 2014
Applicant:

Astrodesign, Inc., Tokyo, JP;

Inventors:

Toshiharu Takesue, Tokyo, JP;

Shigeto Takeda, Tokyo, JP;

Nobuyuki Nishizawa, Tokyo, JP;

Tatsuho Arima, Tokyo, JP;

Shigeaki Suzuki, Tokyo, JP;

Assignee:

ASTRODESIGN, INC., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/44 (2006.01); G01B 9/02 (2006.01); G01B 9/04 (2006.01); G02B 21/00 (2006.01); G02B 21/14 (2006.01);
U.S. Cl.
CPC ...
G01J 1/44 (2013.01); G01B 9/02002 (2013.01); G01B 9/02003 (2013.01); G01B 9/02019 (2013.01); G01B 9/02097 (2013.01); G01B 9/04 (2013.01); G02B 21/0056 (2013.01); G02B 21/0084 (2013.01); G02B 21/14 (2013.01); G01B 2290/45 (2013.01);
Abstract

A spatial frequency reproducing apparatus includes a light source, a first means for modulating a light emitted from the light source into two lights having different frequencies and separately irradiated adjacently, a second means for two-dimensionally scanning the two lights, a third means for irradiating an object under measurement with the two lights, a fourth means for receiving and converting into an electrical signal at least two or more divided lights from the object under measurement with a boundary line being interposed therebetween in a direction substantially perpendicular to the direction separating the two lights, a fifth means for amplifying respective photoelectrically converted electrical signals while varying a degree of amplification according to frequencies thereof and generating a difference signal or a summation signal of the amplified signals, and a sixth means for obtaining a phase difference or an intensity difference of these signals to obtain a measurement value.


Find Patent Forward Citations

Loading…