The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Apr. 29, 2013
Applicant:
Duerr Systems Gmbh, Bietigheim-Bissingen, DE;
Inventors:
Dietmar Wieland, Waiblingen, DE;
Oliver Iglauer, Stuttgart, DE;
Christof Knuesel, Munich, DE;
Marius Winkler, Pleidelsheim, DE;
Assignee:
DUERR SYSTEMS GMBH, Bietigheim-Bissingen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F15C 1/16 (2006.01); F24F 9/00 (2006.01); F26B 25/06 (2006.01); F26B 25/00 (2006.01); F26B 19/00 (2006.01); F26B 15/14 (2006.01); F26B 21/04 (2006.01); F26B 15/10 (2006.01); F26B 21/00 (2006.01); F26B 21/02 (2006.01); F26B 25/12 (2006.01); B60S 3/00 (2006.01); F26B 21/14 (2006.01); F26B 23/02 (2006.01);
U.S. Cl.
CPC ...
F24F 9/00 (2013.01); F26B 15/10 (2013.01); F26B 15/14 (2013.01); F26B 21/004 (2013.01); F26B 21/028 (2013.01); F26B 21/04 (2013.01); F26B 25/008 (2013.01); F26B 25/12 (2013.01); B60S 3/002 (2013.01); F26B 21/14 (2013.01); F26B 23/022 (2013.01); F26B 2210/12 (2013.01);
Abstract
A process chamber () has an interior space (). In the interior space (), there is a receiving region () for workplaces (). The process chamber () has an opening () for the entry and exit of workplaces (). The process chamber includes an arrangement () for injecting gaseous fluid into the interior space (). The arrangement for injecting gaseous fluid has at least one nozzle () for producing a fluid flow curtain () between the opening () and the receiving region () for workplaces ().