The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 19, 2016
Filed:
Apr. 04, 2014
Applicant:
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Inventors:
Byungchul Lee, Seoul, KR;
Dong Sul Kim, Hwaseong-si, KR;
JaeSeok Park, Suwon-si, KR;
Jinhan Park, Hwaseong-si, KR;
Assignee:
Samsung Display Co., Ltd., , KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 38/10 (2006.01); B32B 43/00 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
B32B 38/10 (2013.01); B32B 43/006 (2013.01); B32B 2310/025 (2013.01); B32B 2457/20 (2013.01); B32B 2457/206 (2013.01); H01L 51/0013 (2013.01); H01L 51/56 (2013.01); Y10T 156/1126 (2015.01); Y10T 156/1153 (2015.01); Y10T 156/1174 (2015.01); Y10T 156/1911 (2015.01); Y10T 156/1944 (2015.01); Y10T 156/1956 (2015.01); Y10T 156/1978 (2015.01);
Abstract
A film peeling apparatus that peels a film attached to a substrate includes a chamber, a transfer unit, and first peeling rollers. The transfer unit is disposed in the chamber to transfer the substrate. The first peeling rollers are disposed in the chamber, each of the first peeling rollers includes a first electrostatic chuck to adsorb a first film attached to the substrate. The first peeling rollers roll the adsorbed first film to peel the first film from the substrate.