The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Aug. 08, 2014
National Kaohsiung University of Applied Sciences, Kaohsiung, TW;
Da-Chen Pang, Kaohsiung, TW;
National Kaosiung University of Applied Sciences, Kaohsiung, TW;
Abstract
A manufacturing method of a sensor device integrated with ultrasonic transducer and microphone is to form a first support structure, a back plate, a second support structure, a membrane and electrodes on a substrate. The substrate is divided into a first region and a second region. The first electrode, the third electrode, a part of the back plate, a part of the second support structure and a part of the membrane that are above the first region form the ultrasonic transducer. The first support structure, the second electrode, the fourth electrode, a part of the back plate, a part of the second support structure and a part of the membrane that are above the second region form the microphone. The ultrasonic transducer and the microphone are simultaneously manufactured.