The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Mar. 08, 2013
Applicant:
Joled Inc., Tokyo, JP;
Inventors:
Masaki Aonuma, Fukuoka, JP;
Takuya Satoh, Kyoto, JP;
Akira Takiguchi, Hyogo, JP;
Yoichiro Yashiro, Osaka, JP;
Assignee:
JOLED INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 51/52 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0021 (2013.01); C23C 14/086 (2013.01); H01L 51/5234 (2013.01); H01L 2251/308 (2013.01); H01L 2251/5315 (2013.01);
Abstract
A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.