The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2016

Filed:

Nov. 22, 2011
Applicants:

IN Sang Song, Osan-si, KR;

Sung Woo Hwang, Seoul, KR;

Yun Kwon Park, Dongducheon-si, KR;

Byeong Kwon Ju, Seoul, KR;

Jae Sung Rieh, Seoul, KR;

Jea Shik Shin, Hwaseong-si, KR;

Hee Tae Kim, Seosan-si, KR;

Inventors:

In Sang Song, Osan-si, KR;

Sung Woo Hwang, Seoul, KR;

Yun Kwon Park, Dongducheon-si, KR;

Byeong Kwon Ju, Seoul, KR;

Jae Sung Rieh, Seoul, KR;

Jea Shik Shin, Hwaseong-si, KR;

Hee Tae Kim, Seosan-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01L 29/10 (2006.01); H01L 29/41 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H03D 1/18 (2006.01); H03D 3/26 (2006.01); H03D 7/12 (2006.01); H01L 29/78 (2006.01); H03H 9/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0676 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 29/1033 (2013.01); H01L 29/413 (2013.01); H01L 29/4238 (2013.01); H01L 29/42376 (2013.01); H01L 29/66439 (2013.01); H03D 1/18 (2013.01); H03D 3/26 (2013.01); H03D 7/12 (2013.01); H01L 29/785 (2013.01); H03H 2009/02314 (2013.01);
Abstract

A resonator and a method for manufacturing a resonator are provided. The method may include doping a wafer, and forming on the wafer a substrate, a drain electrode, a source electrode, a gate electrode, and at least one nanowire.


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