The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2016

Filed:

Aug. 27, 2014
Applicant:

Semiconductor Components Industries, Llc, Phoenix, AZ (US);

Inventors:

Satyadev Nagaraja, San Jose, CA (US);

Rayner Barboza, Sunnyvale, CA (US);

Giovanni Margutti, Avezzano, IT;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/425 (2006.01); H01L 21/00 (2006.01); H01L 21/8249 (2006.01); H01L 27/146 (2006.01); H01L 21/265 (2006.01); H01L 21/266 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1463 (2013.01); H01L 21/266 (2013.01); H01L 21/2652 (2013.01); H01L 27/14641 (2013.01); H01L 27/14643 (2013.01); H01L 27/14685 (2013.01); H01L 27/14689 (2013.01);
Abstract

Image sensors may include a plurality of photodiodes. The photodiodes may be isolated from each other using isolations regions formed from p-well or n-well implants. Deep and narrow isolation regions may be formed using a multi-step process that selectively places implants at desired depths in a substrate. If desired, the multi-step process may include only one photolithographic patterning step, which in turn can help reduce costs, fabrication time, and alignment errors. The process may include passing ions through a stack of alternating layers of material such as alternating layers of oxide and nitride. After each implant, a layer in the stack may be removed and ions may be passed through the layers remaining in the stack to form an implant at a different depth in the substrate.


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