The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9312141 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 12, 2016

Filed:

Nov. 21, 2013
Applicant:

Hgst Netherlands B.v., Amsterdam, NL;

Inventors:

Thomas E. Karis, Aromas, CA (US);

Bruno Marchon, Palo Alto, CA (US);

Bala K. Pathem, Fremont, CA (US);

Franck D. Rose dit Rose, San Jose, CA (US);

Kurt A. Rubin, San Jose, CA (US);

Erhard Schreck, San Jose, CA (US);

Assignee:

HGST Netherlands B.V., Amsterdam, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/306 (2006.01); B81C 1/00 (2006.01); H01L 21/321 (2006.01); G11B 5/84 (2006.01); B24B 37/04 (2012.01);
U.S. Cl.
CPC ...
H01L 21/30625 (2013.01); B24B 37/048 (2013.01); B81C 1/00 (2013.01); G11B 5/8408 (2013.01); H01L 21/3212 (2013.01);
Abstract

A method for polishing a carbon overcoat of a magnetic media that results in a smooth surface free of carbon cluster debris. The method involves forming a magnetic disk having a carbon overcoat formed thereon. The carbon overcoat is then polished in the presence of ozone (O). The heat from the polishing process along with the presence of the ozone, cause any carbon particles removed by the polishing to form COgas so that there is no remaining carbon particle debris on the surface of the disk.


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