The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
Oct. 25, 2012
Canon Kabushiki Kaisha, Tokyo, JP;
Masafumi Kyogaku, Yokohama, JP;
Kota Iwasaki, Atsugi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a mass distribution spectrometry which reduces an influence of the dispersion in the times at which ionizing beams irradiate a sample, on a mass spectrometry result, and can measure the mass distribution with high reliability. The mass distribution spectrometry is a mass spectrometry which includes irradiating the sample with a primary ion beam and detecting generated secondary ions, wherein this primary ion beam has a spread toward a direction perpendicular to a travelling direction, has a path length of each primary ion contained in the primary ion beam between a primary ion source and a surface of the sample adjusted by deflecting a trajectory, and is obliquely incident on the surface of the sample.