The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2016
Filed:
May. 08, 2012
Applicant:
Manabu Shimomura, Kyoto, JP;
Inventor:
Manabu Shimomura, Kyoto, JP;
Assignee:
SHIMADZU CORPORATION, Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/06 (2006.01); G01T 1/28 (2006.01); H01J 49/02 (2006.01); H01J 49/24 (2006.01);
U.S. Cl.
CPC ...
H01J 49/068 (2013.01); G01T 1/28 (2013.01); H01J 49/025 (2013.01); H01J 49/24 (2013.01);
Abstract
Flanges () of an attachment plate () integrally combined with an ion detector () are fixed to an inner surface of a vacuum chamber () via cushioning members (), such as O-rings. Although the vacuum chamber () mechanically vibrates due to a turbomolecular pump attached to it, this vibration is absorbed by the cushioning members (), whereby the vibration of the ion detector () is suppressed. As a result, the noise which occurs with a vibration of the ion detector () and is superposed on the detection signal is reduced. Thus, the quality of the detection signal can be improved by a simple and inexpensive structure.