The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 12, 2016

Filed:

Nov. 09, 2011
Applicants:

Yong-il Kim, Chungcheongnam-do, KR;

Jung-ho Bang, Paju-si, KR;

Gi-sang Hong, Paju-si, KR;

Inventors:

Yong-Il Kim, Chungcheongnam-do, KR;

Jung-Ho Bang, Paju-si, KR;

Gi-Sang Hong, Paju-si, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 9/02 (2006.01); H01J 9/46 (2006.01); G02F 1/1343 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G02F 1/13439 (2013.01); H01L 21/67173 (2013.01); H01L 21/67213 (2013.01);
Abstract

An apparatus and method for fabricating a flat panel display device are discussed. According to an embodiment, the apparatus includes a coating line configured to form a transparent conductive metal layer on a substrate, a blackening line configured to blacken the transparent conductive metal layer, an exposure line configured to expose the blackened metal layer, a developing line configured to receive the exposed substrate having the blackened metal layer and to perform development on the received substrate to form a blackened metal pattern on the substrate, and an annealing line configured to perform annealing on the blackened metal pattern on the substrate to restore the blackened metal pattern to a transparent metal pattern.


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